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Success of three dimension micro-fabrication using high energy proton beam writing (PBW).Feb. 19, 2007Japan Atomic Energy Agency (hereafter JAEA, President, Toshio Okazaki) in collaboration with Shibaura Institute Technology (Hereafter SIT, President, Masaru Hirata) (since 2005 fy.) developed a micro-machining technique so called Proton Beam Writing (hereafter PBW) by means of lithography using 3 MeV (3 million eV) proton microbeams with a diameter of hundreds of nano-meter to bombard resists at JAEA�s ion beam facility, Takasaki Ion Accelerators for Advanced Radiation Application (hereafter TIARA). They succeeded in developing the prototype of 3-dimension (3D) �Arch of Triumph� shape structures, as shown in Fig.1, having a high aspect ratio of more than 10 times with a height of more than 50 micro-meter to a horizontal size of hundreds nano-meter. This micron-sized 3D high-aspect ratio structure, which was produced by PBW for the first time in Japan, showed that their PBW technique was reached to the top level in the world. Along with this development, JAEA and KOBE STEEL, LTD. started to develop a compact machining system dedicated for PBW, which would enable us to prototype biological, optical or other application devices with fine structures required for their industrialization. These three corporations are aiming to establish PBW technique to realize 3-dimension machining with finer resolution and to develop the small machining system in their collaboration. The achievement of the production of the 3D structure will be presented in a symposium on �A micromachining technique using ion micro- and nano-beam in MeV range and their applications�, which is also an opening memorial for the Center for Flexible Machining established in the research organization for advanced engineering in SIT. |
